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    • A DMD-based method for fabricating small pitch grating scales of optical linear encoders 

      Lu, Xinji; Kilikevičius, Artūras; XU, Wenbin; XU, Jia (Mechanika 2023: proceedings of the 27th international scientific conference, 26 May 2023, Kaunas University of Technology, Lithuania, 2023)
      The width of the pitch period on grating scales is fundamental and critical to the accuracy of optical linear encoders. This paper presents a novel digital lithography-based method for fabricating small-pitch grating scales. ...