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Self-formation processes in technologies of integrated circuits

dc.contributor.authorNavickas, Romualdas
dc.date.accessioned2023-09-18T08:48:13Z
dc.date.available2023-09-18T08:48:13Z
dc.date.issued2003
dc.identifier.other(BIS)VGT02-000005369
dc.identifier.urihttps://etalpykla.vilniustech.lt/handle/123456789/107432
dc.format.extent59 p.
dc.format.mediumtekstas / txt
dc.language.isoeng
dc.titleSelf-formation processes in technologies of integrated circuits
dc.typeHabilitacinio darbo santrauka / Habilitation work summary
dc.type.pubtypeETD_HBL_S - Habilitacinio darbo santrauka / Habilitation thesis abstract
dc.contributor.institutionVilniaus Gedimino technikos universitetas
dc.contributor.facultyElektronikos fakultetas / Faculty of Electronics
dc.subject.researchfieldT 001 - Elektros ir elektronikos inžinerija / Electrical and electronic engineering
dc.subject.ltIntegrinės schemos
dc.subject.ltVilniaus Gedimino technikos universitetas Disertacijos
dc.publisher.nameTechnika
dc.publisher.cityVilnius
dc.identifier.elaba14393778


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