dc.contributor.author | Belosludtsev, Alexandr | |
dc.contributor.author | Sytchkova, Anna | |
dc.contributor.author | Baltrušaitis, Kazimieras | |
dc.contributor.author | Vaičikauskas, Viktoras | |
dc.contributor.author | Jasulaitienė, Vitalija | |
dc.contributor.author | Gric, Tatjana | |
dc.date.accessioned | 2023-09-18T16:34:45Z | |
dc.date.available | 2023-09-18T16:34:45Z | |
dc.date.issued | 2023 | |
dc.identifier.issn | 2079-6412 | |
dc.identifier.uri | https://etalpykla.vilniustech.lt/handle/123456789/115155 | |
dc.description.abstract | We report a systematic nanoscale investigation on the ultrathin Cr film growth process and properties. Polycrystalline metallic films were manufactured by magnetron sputtering on fused silica substrates. The film growth was observed in situ by broad-band optical monitoring (BBM) and plasma-emission spectroscopy (OES) methods. The ex situ characterization of the Cr films with thicknesses varying from 2.6 nm up to 57 nm were performed by both non-destructive and destructive techniques. Recently, we reported on a novel set of data for optical and electrical properties of sputtered chromium films. The optical and electrical properties of the films are known to be governed by their structure and microstructure, which were analyzed in detail in the present research. Moreover, the optical properties of the films were studied here in a significantly wider optical range and obtained using both in situ and ex situ measurements. Reliable in situ nanoscale characterization of metal films was shown to ensure an unfailing approach in obtaining ultrathin layers with desirable thickness and stable and well-determined optical constants and electrical conductivity. This is of high importance for various industries and novel upcoming applications. | eng |
dc.format | PDF | |
dc.format.extent | p. 1-11 | |
dc.format.medium | tekstas / txt | |
dc.language.iso | eng | |
dc.relation.isreferencedby | Science Citation Index Expanded (Web of Science) | |
dc.relation.isreferencedby | Scopus | |
dc.rights | Laisvai prieinamas internete | |
dc.source.uri | https://www.mdpi.com/2079-6412/13/2/347 | |
dc.source.uri | https://talpykla.elaba.lt/elaba-fedora/objects/elaba:154645462/datastreams/MAIN/content | |
dc.title | Growth of magnetron‐sputtered ultrathin chromium films: In situ monitoring and ex situ film properties | |
dc.type | Straipsnis Web of Science DB / Article in Web of Science DB | |
dcterms.accessRights | This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https:// creativecommons.org/licenses/by/ 4.0/). | |
dcterms.license | Creative Commons – Attribution – 4.0 International | |
dcterms.references | 47 | |
dc.type.pubtype | S1 - Straipsnis Web of Science DB / Web of Science DB article | |
dc.contributor.institution | Valstybinis mokslinių tyrimų institutas Fizinių ir technologijos mokslų centras | |
dc.contributor.institution | ENEA Casaccia | |
dc.contributor.institution | Valstybinis mokslinių tyrimų institutas Fizinių ir technologijos mokslų centras Vilniaus Gedimino technikos universitetas | |
dc.contributor.faculty | Elektronikos fakultetas / Faculty of Electronics | |
dc.subject.researchfield | T 001 - Elektros ir elektronikos inžinerija / Electrical and electronic engineering | |
dc.subject.researchfield | N 002 - Fizika / Physics | |
dc.subject.researchfield | T 008 - Medžiagų inžinerija / Material engineering | |
dc.subject.studydirection | C02 - Fizika / Physics | |
dc.subject.vgtuprioritizedfields | FM0101 - Fizinių, technologinių ir ekonominių procesų matematiniai modeliai / Mathematical models of physical, technological and economic processes | |
dc.subject.ltspecializations | L104 - Nauji gamybos procesai, medžiagos ir technologijos / New production processes, materials and technologies | |
dc.subject.en | ultrathin metal films | |
dc.subject.en | chromium | |
dc.subject.en | magnetron sputtering | |
dc.subject.en | optical monitoring | |
dc.subject.en | optical properties | |
dc.subject.en | structural properties | |
dc.subject.en | microstructural properties | |
dcterms.sourcetitle | Coatings: Advances in optical and optoelectronic: Materials and applications | |
dc.description.issue | iss. 2 | |
dc.description.volume | vol. 13 | |
dc.publisher.name | MDPI | |
dc.publisher.city | Basel | |
dc.identifier.doi | 000938880800001 | |
dc.identifier.doi | 10.3390/coatings13020347 | |
dc.identifier.elaba | 154645462 | |