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The mechanism of defects formation in silicon substrates

dc.contributor.authorBogorosh, Alexander
dc.contributor.authorVoronov, Sergey
dc.contributor.authorVišniakov, Nikolaj
dc.contributor.authorŠčekaturovienė, Danutė
dc.contributor.authorBubulis, Algimantas
dc.date.accessioned2023-09-18T17:43:15Z
dc.date.available2023-09-18T17:43:15Z
dc.date.issued2009
dc.identifier.other(BIS)VGT02-000020591
dc.identifier.urihttps://etalpykla.vilniustech.lt/handle/123456789/125501
dc.format.extentp. 217
dc.format.mediumtekstas / txt
dc.language.isoeng
dc.titleThe mechanism of defects formation in silicon substrates
dc.typeKonferencijos pranešimo santrauka / Conference presentation abstract
dcterms.references6
dc.type.pubtypeT2 - Konferencijos pranešimo tezės / Conference presentation abstract
dc.contributor.institutionNational Technical University of Ukraine "KPI"
dc.contributor.institutionVilniaus Gedimino technikos universitetas
dc.contributor.institutionKauno technologijos universitetas
dc.contributor.facultyMechanikos fakultetas / Faculty of Mechanics
dc.subject.researchfieldT 008 - Medžiagų inžinerija / Material engineering
dc.subject.researchfieldT 009 - Mechanikos inžinerija / Mechanical enginering
dcterms.sourcetitleThe 5th International Conference "Mechatronic Systems and Materials". MSM-2009 : abstracts, 22-25 October, 2009 Vilnius, Lithuania
dc.publisher.nameTechnika
dc.publisher.cityVilnius
dc.identifier.elaba3898090


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