| dc.contributor.author | Barzdėnas, Vaidotas | |
| dc.contributor.author | Navickas, Romualdas | |
| dc.date.accessioned | 2023-09-18T19:08:44Z | |
| dc.date.available | 2023-09-18T19:08:44Z | |
| dc.date.issued | 2012 | |
| dc.identifier.isbn | 9786094571558 | |
| dc.identifier.other | (BIS)VGT02-000024705 | |
| dc.identifier.uri | https://etalpykla.vilniustech.lt/handle/123456789/136005 | |
| dc.description.abstract | The book describes theoretical and practical works of key technology issues for microelectronic fabrication and introduces the technology computer-aided design (TCAD) simulation tools to the reader. Examples of computer simulations provide a technically accurate introduction to advanced semiconductor manufacturing technologies: epitaxial growth, thermal oxidation, thermal diffusion and ion implantation, photolithography, etch, metallization. This publication has been produced with the financial assistance of Europe Social Fund and VGTU (Project No VP1-2.2-ŠMM-07-K-01-047). The book is a part of the project “The Essential Renewal of Undergraduates Study Programs of VGTU Electronics Faculty”. | eng |
| dc.format | PDF | |
| dc.format.extent | 147 p. | |
| dc.format.medium | tekstas / txt | |
| dc.language.iso | eng | |
| dc.source.uri | http://dspace.vgtu.lt/bitstream/1/1379/1/1337_Barzdenas%2c_Navickas_Microtechnologies_web.pdf | |
| dc.title | Microtechnologies : a laboratory manual | |
| dc.type | Mokomoji knyga / Teaching book | |
| dcterms.accessRights | Recenzentai: prof. habil dr Saulius Balevičius (VGTU Elektrotechnikos katedra), prof. dr Algirdas Baškys (VGTU Kompiuterių inžinerijos katedra) | |
| dcterms.references | 3 | |
| dc.type.pubtype | K2b - Mokomoji knyga / Educational book | |
| dc.contributor.institution | Vilniaus Gedimino technikos universitetas | |
| dc.contributor.faculty | Elektronikos fakultetas / Faculty of Electronics | |
| dc.subject.researchfield | T 001 - Elektros ir elektronikos inžinerija / Electrical and electronic engineering | |
| dc.publisher.name | Technika | |
| dc.publisher.city | Vilnius | |
| dc.identifier.doi | 10.3846/1337-S | |
| dc.identifier.elaba | 3984384 | |
