Experimental investigation of machining parameters in polishing optical parts made of Suprasil

Abstract

This article analyzes the influence of polishing speed (rotational speed of the pad), pressing force, and process duration on surface flatness deviation and surface roughness during polishing of flat optical parts made of Suprasil(R) material. Experimental investigations were carried out using the Taguchi L9 experimental design, shape deviation and surface roughness parameters were measured, and the obtained results were processed using statistical processing software. It has been found that increasing the rotational speed of the pad and pressing force allows one to obtain a smoother surface, deviations from the flatness decreases as the rotational speed of the polishing pad increased.