Line scale comparator carriage vibrations during dynamic calibration

Abstract

Oscillations of the comparator, which is used for the dynamic calibration of long optical line scales, are analyzed in the paper. The accuracy of determination of the position of optical lines on the scale depends on the velocity of the carriage, which transports the microscope with a CCD camera in relation to the scale. Oscillations influence the velocity equability, its value, at the same time the error compo measuring.