Miniature high resolution laser beam deflectors with multi DOF piezoelectric kinematic pairs

Abstract

Research and development of high resolution miniature piezoelectric 1DOF and 2DOF laser beam deflectors are presented in the paper. All deflectors feature a simple design and practically unlimited angular displacement. The first group of the presented deflectors includes devices with an active mirror. External surface of the mirror is covered by piezoelectric layer with sectioned electrodes. Two and four electrode sections are used for 1DOF and 2 DOF deflector respectively. The second group of the deflectors contains application of the “shaking beam” type actuators. Two different designs of actuators are presented. Both of the actuators have driving tip located in the center of the actuator. A harmonic electric signal is used to drive deflectors of the both groups. The experimental results confirmed the operating principle of the deflectors. A high resolution of the deflectors was achieved during experimental study.