Intelligent control and performance evaluation of a novel precise positioning stage

Abstract

A novel planar precise positioning stage on the rotating platform for calibration on raster scales of the rotary encoder is proposed in this paper. The monolithic structure is constructed with a flexible element and two ultra-fine adjustment screws. The structure for required motion is designed and optimized by software package of Solid Works Simulation, and then their performances are evaluated using numerical modelling approach. The mathematical model is then verified by resorting to finite element analysis (FEA) and experiment. The established analytical FEA models are helpful for optimizing a reliable architecture and improving performance of the precise positioning system