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The mechanism of defects formation in silicon substrates

dc.contributor.authorBogorosh, Alexander
dc.contributor.authorVoronov, Sergey
dc.contributor.authorVišniakov, Nikolaj
dc.contributor.authorŠčekaturovienė, Danutė
dc.contributor.authorBubulis, Algimantas
dc.date.accessioned2023-09-18T17:47:40Z
dc.date.available2023-09-18T17:47:40Z
dc.date.issued2010
dc.identifier.issn1012-0394
dc.identifier.other(BIS)VGT02-000021063
dc.identifier.urihttps://etalpykla.vilniustech.lt/handle/123456789/126096
dc.description.abstractComponents of navigating devices can be affected by acoustic emission and vibration. Therefore prototype samples and electronic components must be tested in such conditions. Heterostructures, which destructed under the action of external physical factors and kinetics of formations of porous defects in silicon substrates, were analyzed.eng
dc.formatPDF
dc.format.extentp. 7-12
dc.format.mediumtekstas / txt
dc.language.isoeng
dc.relation.isreferencedbyConference Proceedings Citation Index - Science (Web of Science)
dc.relation.isreferencedbyScopus
dc.source.urihttp://www.scientific.net/SSP.165.7
dc.titleThe mechanism of defects formation in silicon substrates
dc.typeStraipsnis konferencijos darbų leidinyje Web of Science DB / Paper in conference publication in Web of Science DB
dcterms.references6
dc.type.pubtypeP1a - Straipsnis konferencijos darbų leidinyje Web of Science DB / Article in conference proceedings Web of Science DB
dc.contributor.institutionNational Technical University of Ukraine "KPI"
dc.contributor.institutionVilniaus Gedimino technikos universitetas
dc.contributor.institutionKauno technologijos universitetas
dc.contributor.facultyMechanikos fakultetas / Faculty of Mechanics
dc.subject.researchfieldT 008 - Medžiagų inžinerija / Material engineering
dc.subject.researchfieldT 009 - Mechanikos inžinerija / Mechanical enginering
dc.subject.enHeterostructures on silicon substrate
dc.subject.enDefect formation
dc.subject.enNanocrack
dc.subject.enNavigating electronic devices
dcterms.sourcetitleSolid State Phenomena : Mechatronic Systems and Materials : materials production technologies : selected, peer reviewed papers from the 5th International conference on mechatronic systems and materials MSM 2009, which was held in Vilnius, Lithuania, from 22 to 25 October 2009
dc.description.volumeVol. 165
dc.publisher.nameTrans Tech Publications Ltd
dc.publisher.citySwitzerland
dc.identifier.doiKTU02-000043828
dc.identifier.doi000289534900001
dc.identifier.doi10.4028/www.scientific.net/SSP.165.7
dc.identifier.elaba3906985


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