Small size ultrasonic piezoelectric actuator for 2DOF positioning

Abstract

A new ultrasonic piezoelectric actuator for object positioning in a plane has been developed. Actuator has small size and simple design. It consists of a ring type bimorph stator and four carbon fiber beams. Electro des of piezoceramic ring are divided into four equal secto rs. Carbon fiber beams are glued to the stator and are used to move object in two perpendicular directions in the plane or to achieve a curvilinear or rotational mot ion of the positioned object. Actuator can be used to rotate a sphere about three perpendicular axes as well. Out -of-phase harmonic signals are used for excitation. Configura tion of electrodes allows to use different excitati on schemes of the actuator by varying an input voltage amplitu de and phase. Standing or travelling wave vibration s of the actuator can be achieved and different moving traje ctories of the positioning object can be realized.