| dc.contributor.author | Navickas, Romualdas | |
| dc.date.accessioned | 2023-09-18T20:03:59Z | |
| dc.date.available | 2023-09-18T20:03:59Z | |
| dc.date.issued | 2013 | |
| dc.identifier.other | (BIS)VGT02-000028242 | |
| dc.identifier.uri | https://etalpykla.vilniustech.lt/handle/123456789/146439 | |
| dc.description.abstract | This paper presents the analysis of self-formation processes of micro and nanostructures in technologies of manufacturing high-speed semiconductor devices and integrated circuits (ICs) according possibilities to receive the minimal width of the base area and the methods used for the formation of contacts and electrodes. The results of the implementation of self-formation processes for creating new technologies of manufacturing semiconductor devices and ICs have been presented. | eng |
| dc.format | PDF | |
| dc.format.extent | p. 1-8 | |
| dc.format.medium | tekstas / txt | |
| dc.language.iso | eng | |
| dc.relation.isreferencedby | Conference Proceedings Citation Index - Science (Web of Science) | |
| dc.relation.isreferencedby | IEEE Xplore | |
| dc.source.uri | http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6701997&sortType%3Dasc_p_Sequence%26filter%3DAND%28p_IS_Number%3A6701993%29 | |
| dc.subject | MC02 - Elektros ir elektroniniai įrenginiai bei sistemos / Electrical and electronic devices and systems | |
| dc.title | Self-formation processes in high-speed integrated circuits | |
| dc.type | Straipsnis konferencijos darbų leidinyje Web of Science DB / Paper in conference publication in Web of Science DB | |
| dcterms.references | 16 | |
| dc.type.pubtype | P1a - Straipsnis konferencijos darbų leidinyje Web of Science DB / Article in conference proceedings Web of Science DB | |
| dc.contributor.institution | Vilniaus Gedimino technikos universitetas | |
| dc.contributor.faculty | Elektronikos fakultetas / Faculty of Electronics | |
| dc.subject.researchfield | T 001 - Elektros ir elektronikos inžinerija / Electrical and electronic engineering | |
| dc.subject.ltspecializations | L106 - Transportas, logistika ir informacinės ir ryšių technologijos (IRT) / Transport, logistic and information and communication technologies | |
| dc.subject.en | Self-formation processes | |
| dc.subject.en | Integrated circuits (ICs) | |
| dc.subject.en | Non-lithography methods | |
| dcterms.sourcetitle | NORCHIP 2013: Vilnius, Lithuania, 11-12 Nov. 2013 | |
| dc.publisher.name | IEEE | |
| dc.publisher.city | New York | |
| dc.identifier.doi | 000345902700001 | |
| dc.identifier.doi | 10.1109/NORCHIP.2013.6701997 | |
| dc.identifier.elaba | 4070008 | |
