Miniature rotary tables with piezoelectric hemispheres: research and development

Abstract

The aim of this research is to develop and investigate two modi fications of high resolution miniature rotary tables, based on the transformation of 3D resonant oscillations of hemisphere actuators into continuous or start-stop motion of contacting rotary table. To generate 3D resonant oscillations of the contacting points, the electrodes of the actuators are sectioned into several parts, enabling the generation of traveling wave type higher forms of oscillations. The results of modeling of hemisphere actuators are presented toget her with experimental investigation of resolution and response time. It is shown that axial oscillations of the table and its torsional oscillations can be generated, extending the functionality of the devices.