A study on sputtered ultrathin chromium films for optical applications

Abstract

Structural, optical, and electrical properties of ultrathin chromium films manufactured using magnetron sputtering were investigated. The films showed pure metallic chromium phase yet their refractive index and extinction coefficient result very different from previously reported in literature. Structural, electrical and optical properties of ultrathin chromium layers are discussed in detail. The obtained optical constants of ultrathin chromium films show a specific trend with the film thickness increase. Precise knowledge of optical constants of ultrathin chromium films is important for many electrooptical and optical applications.