Investigation of 1 degree of freedom piezoelectric laser deflector/scanner

Abstract

This paper presents the investigation of 1DOF pi-ezoelectric laser deflecting/scanning device used for laser control systems. Dynamic characteristics of device were obtained experimentally. The main characteristic were ob-tained frequency response, impedance, trajectories of sup-port elements and resolution. Obtained parameters showed, that device could be used for purposed aim when it is ex-cited by 61.3 kHz and harmonic electrical signal of 60V. The highest 0.45 μrad resolution was reached at same exci-tation conditions.