Analysis of cylindrical piezoelectric actuator used in 3-DOF deflectors

Abstract

This paper analyses deflectors used f or mirror positioning in lasers used for measurement. A general problem is the changes in the modal shape sequence. It is important to correctly choose eigenfrequencies, otherwise the piezoelectric actuator will not function properly therefore it is important to numerically determine eigenform. A number of calculations with different geometrical parameters of the actuator were performed, influence of geometrical parameters and advantage of the domination coefficients are presented, results and conclusions are given.