Dynamic method of grating scale calibration by photosensitive cell matrix

Abstract

A dynamic method of linear scale calibration by means of a photosensitive cell matrix is presented in this paper. Such a method using an ultra-fast global shutter camera is applied in a long grating scale calibration comparator that has been constructed at Precizika Metrology Lithuanian private company, Vilnius. The achieved ±0.14 µm positional error of line detection at 5 mm/s calibration speed is an acceptable precision for the grating scale calibration comparator.