Piezoelectric wide range laser deflecting/scanning devices with one and two degrees-of-freedom: state of the art and latest developments

Abstract

The paper covers state of the art and latest development of piezoelectric motors at Kaunas University of Technology that are related to the development of laser scanning and deflecting devices. All presented motors are multi-degree-of-freedom resonant devices and generate continuous or step motion of the positioning object. Three different design and operating principles of piezoelectric actuators are described. Introduced piezoelectric devices can be characterized by specific areas of application, different accuracy, resolution and time response. Dynamic models of transforming oscillations into controlled rotation of the mirror are investigated.