Refinements of precision line scale calibration system

Abstract

The paper treats the issue of embedding the traceable length metrology into technological process by performing precise dynamic measurements of line scale in its manufacture line. It addresses the error-related problems specific to line scale calibration in dynamic mode of operation that are caused primarily by dynamic loads. The precision line scale calibration in dynamical mode of operation is considered. Modal analysis performed and measurements conducted of the spatial vibrations of comparator structure revealed that dynamically-induced errors can noticeably contribute to the measurement uncertainty budget. The contribution was focused on the investigation of both the accuracy of the graduation line detection and the line scale calibration repeatability error reduction. The calibration experiments were performed that intended to document current capabilities to carry out line scale calibrations on high quality graduated scale made on low thermal expansion substrate.