Software based control techniques for precision line scale calibration

Abstract

A precision line scale calibration method in a dynamic regime enables to gain the calibration throughput and simplify the comparator's structure and control. However, the errors featured by geometrical deviations, static and dynamic loads as well as temperature induced deformations should be considered anti incorporated into uncertainty budget. These errors contain random and systematic components and can be minimized by increasing the accuracy of system design and implementing numerical error compensation methods. The paper discusses advances of precision line scale calibration system design gained by, implementing new measurement and software based control techniques.