R&D of high resolution rotary table based on the ultrasonic standing waves

Abstract

This paper covers the essential information associated with recently developed piezoelectric rotary drive being able to act as the basis for most of forthcoming relevant devices. The aim of the work is to investigate such a novel table the operation of which relies on transformation of resonant ultrasonic standing wave oscillations into continuous or start-stop motion. Angular position of the device is registered by means of integrated optical encoder-type subsystem. A significant attention is paid to the structure, numerical analysis and dynamic characteristics of the drive.