Numerical modeling of a compliant based positloning stage

Abstract

This paper proposes a novel compliant based planar precise positioning stoge on the rotational platform for calibration of the rotary encoder's raster scales. The monolithic structure is featured with flexure-based joints and two piezostack actuators. The monolithic structure for required motion were designed and optimized then their performances have been evaluated by numerical approach using Motlab/Simulink software package.