Nanokristalinis silicis - perspektyvi medžiaga ateities mikro- ir nanoelektronikai

Abstract

The problem of silicon laser is discussed. The porous silicon layers containing silicon nanocrystals were made by electrochemical etching technology. The recombination radiation of silicon nanocrystals was investigated in the spectral range of wavelengths of (0.7-1.2) μm. The radiation recombination coefficient of the order of 10¯¹³ cm³/s was found in silicon nanocrystals. The DBR optical mirrors and Fabry-Perot micro cavity were fabricated and investigated by optical reflection measurements in (0.6-2.0) μm wavelength spectral range.