Amorfinių hidrogenizuotų anglies sluoksnių optinės savybės

Abstract

Amorphous diamond-like hydrogenated carbon films grown on Si substrate from C2H2+H2 plasma were investigated by ellipsometric and reflectance techniques in the UV-VIS-NIR spectral range 0.5-5.0 eV. The optical constants of a-C:H films were determined in the model of effective film though the optical response was analyzed in a multi-layer model. Particular features of optical properties were correlated to the technological peculiarities and structural characteristics of a-C:H films.